Handbook of silicon based MEMS materials and technologies

Handbook of silicon based MEMS materials and technologies

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Détails bibliographiques
Support:	E-Book
Langue:	Anglais
Publié:	San Diego, CA : Elsevier Science, 2015.
Autres localisations:	Voir dans le Sudoc
Accès en ligne:	Accès à l'E-book

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